PECVD/HDPCVD Plasma Therm – Advanced Vacuum

PlasmaTherm VERSALINE and Advanced Vacuum VISION Systems

Plasma Enhanced Chemical Vapor Deposition (PECVD) and High Density Plasma Chemical Vapor Deposition (HDPCVD) systems,  Advanced Vacuum for high-quality film deposition.

VERSALINE PECVD

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Plasma-Therm’s VERSALINE PECVD is the result of decades of technological innovation. VERSALINE PECVD systems can deposit many different high-quality films, delivering maximum productivity with low total cost of ownership.

The parallel plate configuration of VERSALINE PECVD is designed to provide a clean processing environment and require little maintenance.

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

VERSALINE HDPCVD

High Density Plasma Chemical Vapor Deposition (HDPCVD) Systems from PlasmaTherm

Plasma-Therm’s VERSALINE HDPCVD product is a new approach to achieving highly dense and conformal films at low substrate temperatures.

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

VISION PECVD 310

Plasma Enhanced Chemical Vapor Deposition (PECVD) Systems from Advanced Vacuum

The Vision 310 PECVD is a fundamental deposition system for semiconductor fabrication and material science facilities. Used in R&D and low volume production applications, the classic parallel plate configuration provides a wide range of high quality, uniform films.

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

VISION PECVD 410

Plasma Enhanced Chemical Vapor Deposition (PECVD) systems from Advanced Vacuum

The Vision 410 PECVD is a film deposition system for R&D, open load production for semiconductor fabrication and material science research.

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