CABL-9000 SERIES
Electron Lithography System
The CABL-C (Crest) Series has evolved out of the previous CABL Series with an enhanced operatibility and functionality in order to meet the needs of users with specific and diverse issues and agendas.
The CABLE-C series features the sophisticated column designed especially for a large-current/small-diameter electron beam, and is equipped with a number of user friendly functions.
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