TXRF 3760

TXRF – Surface Contamination Metrology

Measure elemental contamination at discrete points or with full wafer maps.

TXRF analysis can gauge contamination in all fab processes, including cleaning, litho, etch, ashing, films, etc. Total Reflection X-ray Fluorescence (TXRF) is an indispensable tool for materials and device development for semiconductor manufacturing. Remarkable reliability is achieved thanks to newly developed X-ray optics, a new stage mechanism, and a new concept in compact rotating-anode X-ray sources. High reliability is achieved along with high performance. The TXRF 3760 can measure elements from Na through U with a single-target, 3-beam X-ray system and a solid-state detector system. From R&D to production, the TXRF 3760 helps customers address the technology challenges of shrinking patterns, thinner films, and cleaner processes. Features:
  • Ease of operation and rapid analysis results
  • Accepts 200 mm and smaller wafers
  • Compact design, footprint
  • High-power rotating-anode source
  • Wide range of analytical elements (Na~U)
  • Light-element sensitivity (for Na, Mg, and Al)
  • Application to bare Si and to non-Si substrates
  • Import measurement coordinates from defect inspection tools for follow-up analysis
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