Wafer Disk Analyzer WDA-3650

WDXRF – Simultaneous Spectrometers

Film thickness and composition measurements on wafers and media disks.

The WDA-3650 is extremely compact with the basic unit requiring less than 1 m2 of valuable cleanroom space, and there is no need for side maintenance service access. Power consumption has been reduced more than 20% compared to the previous model. Features:
  • Simultaneous evaluation of film thickness and composition
  • Applicable to all film types
  • Accepts 200mm and smaller wafers and media disks
  • Capable of high analytical performance, accuracy, and stability
  • Patented "diffraction avoidance" capability for accurate XRF results
  • High-sensitivity Boron analysis (with AD-Boron channel)
  • Available auto-calibration function with the optional C-to-C auto loader previously only found on the WaferX 300
  • Oil-free transformer X-ray generator
  • Electric consumption reduced 23% from previous model
Application:
  • Semiconductor devices
  • Insulated film: BPSG, SiO2, Si3N4
  • P-doped Poly-Si, WSi
  • Ferrodielectric thin film: PZT, BST, SBT
  • Metallic film: Al-Si-Cu, TiW, TiN
  • Magnetic disks
  • Magnetic film: CoCrTa, CoPt, Cr
  • Lubricant film: graphite (DLC), polymers with F
  • Substrates: NiP
  • Magnetic heads
  • Permalloy (Ni-Fe)
  • Sendust (Fe-Al-Si)
  • Cutting devices
  • Multilayered metal film: Au/Ni/Ti/Al
  • SiC
  • Composition analysis of SnAg solder bump
  • MEMS
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