The WDA-3650 is extremely compact with the basic unit requiring less than 1 m2 of valuable cleanroom space, and there is no need for side maintenance service access. Power consumption has been reduced more than 20% compared to the previous model.
Simultaneous evaluation of film thickness and composition
Applicable to all film types
Accepts 200mm and smaller wafers and media disks
Capable of high analytical performance, accuracy, and stability
Patented "diffraction avoidance" capability for accurate XRF results