TXRF 3760

TXRF – Metrologia di Contaminazione Superficiale

Misura della Contaminazione Elementale su punti specifici o attraverso la mappatura totale del Wafer.

La Fluorescenza di Raggi X a Riflessione Totale (TXRF) è utilizzata per misurare la contaminazione in tutti i processi fab, compresa la pulizia, litografia, incisione, film ecc. e rappresenta quindi uno strumento indispensabile per lo studio dei materiali e lo sviluppo di dispositivi per la produzione di semiconduttori.

La notevole affidabilità dei sistemi Rigaku è ottenuta grazie al sistema di ottiche per raggi X di nuova concezione, allo stage portacampioni completamente riprogettato e alle nuove sorgenti compatte di raggi X ad anodo rotante. L'elevata affidabilità si abbina alle alte prestazioni, consentendo l’uso di questa tecnica dalla ricerca e sviluppo alla produzione.

Il Rigaku TXRF 3760 è in grado di misurare gli elementi dal Na all’U con un singolo target abbinato al sistema di eccitazione a 3 canali ed il detector a stato solido. Il Rigaku TXRF 3760 rappresenta lo strumento ideale per affrontare le nuove sfide della tecnologia nel mondo dei film sottili per ridurre la contaminazione ai livelli più bassi possibili.

Caratteristiche

  • Facilità d’uso e analisi veloci
  • Possibilità di ospitare wafer fino a 200 mm.
  • Ingombro ridotto
  • Sorgente ad alta potenza ad anodo rotante
  • Ampio range analitico (Na~U)
  • Elevata sensibilità per gli elementi leggeri (Na, Mg, e Al)
  • Utilizzabile con substrati in Si e non
  • In grado di importare le coordinate dei difetti da sistemi di ispezione per le analisi successive
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XzEwNV8yOTgwMTciLCJjb25uZWN0X2hhc2giOiI0MTBiM2RlMmZhMmQwYmU1MDFjOWU3NGIwZDJmYmIxNCJ9

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