Wafer Disk Analyzer WDA-3650

WDXRF – Spettrometri Simultanei

Misure di Spessore del Film e Composizione su Wafer e Dischi Multimediali.

Il Wafer Disk Analyzer RIGAKU WDA-3650 è estremamente compatto, richiedendo meno di un M2 di spazio in camera bianca, e non richiede più l’accesso laterale per la manutenzione.

Il consumo energetico è stato ridotto di oltre il 20% rispetto al modello precedente.

Caratteristiche:

  • Valutazione simultanea di spessore del film e della sua composizione
  • Utilizzabile con tutti i tipi di film
  • Accetta wafer da 8”, 6”, 5” e 4” e dischi multimediali
  • In grado di fornire alte prestazioni analitiche, di precisione e stabilità
  • Funzione "Diffraction Peak Avoidance" brevettata per ottenere risultati molto accurati in XRF eliminando il contributo della diffrazione di raggi X sul campione
  • Elevatissima sensibilità nell’analisi del Boro (con canale dedicato AD-Boro)
  • Disponibile funzione di auto-calibrazione con il caricatore automatico C-to-C opzionale precedentemente disponibile solo sul WaferX 300
  • Generatore di raggi X con trasformatore di alta tensione tipo “oil-free”.
  • Consumo elettrico ridotto del 23% rispetto al modello precedente

Applicazioni:

  • Dispositivi Semiconduttori
  • Film isolanti: BPSG, SiO2, Si3N4 P-doped Poly-Si, WSi
  • Film ferrodielettrici: PZT, BST, SBT
  • Film metallici: Al-Si-Cu, TiW, TiN Dischi Magnetici
  • Film magnetici: CoCrTa, CoPt, Cr
  • Film lubrificanti: grafite (DLC), polimeri con F
  • Substrati: NiP
  • Testine Magnetiche
  • Permalloy (Ni-Fe)
  • Sendust (Fe-Al-Si)
  • Dispositivi di taglio
  • Film metallici multistrato: Au/Ni/Ti/Al
  • SiC
  • Analisi composizionale di SnAg solder bump
  • MEMS
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X2lkIjoiY3NwRm9ybVNoZWxsXzEwNF8yMjAzODMiLCJjb25uZWN0X2hhc2giOiI2MDBmNjVhMWU5ZjI0ZmMxYTFlMDY4ZmM0YTQwOTFhMiJ9

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