Microscopi Elettronici a Scansione (SEM)

La Tescan è in grado di proporre una gamma completa di microscopi elettronici a scansione ad altissime performance, sia con sorgente termoionica che con sorgente a emissione di campo.

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VEGA3

Microscopi SEM Termoionici (W, LaB6)

Ampia gamma di microscopi elettronici a scansione termoionici (W e LaB6) in grado di operare in condizioni di alto e basso vuoto.

Specifiche Tecniche

La serie VEGA3 è disponibile con 4 camere di dimensioni e movimentazioni del tavolino diverse: SB, LM, XM e GM.

Tutte le camere dispongono di numerose porte per tecniche accessorie e hanno una geometria ottimizzata per EDX, WDX e EBSD.

I microscopi sono dotati di un sofisticato controllo dell’elettrottica che consente di visualizzare il campione in ben 5 modalità differenti tra cui immagini stereoscopiche 3D di tipo “live”.

Caratteristiche Principali:

  • Cannone Elettronico: Tungsteno o LaB6
  • Risoluzione HV:
    • Tungsteno – 3nm @ 30kV, 8nm @ 3kV
    • LaB6 – 2nm @ 30kV, 5nm @ 3kV
  • Risoluzione LV:
    • Tungsteno – 3,5nm @ 30kV
    • LaB6 – 2,5nm @ 30kV
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV fino a 3 - 2000 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 1Pa a 2microA

Video

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

MIRA3

Microscopi FE-SEM

Microscopi SEM ad Emissione di Campo per applicazioni di Imaging di alta risoluzione ed elevata versatiltà analitica.

Specifiche Tecniche

Microscopio elettronico a scansione con sorgente ad emissione di campo FE-SEM, progettato per ottenere alta risoluzione di fascio e immagini caratterizzate da un eccellente rapporto segnale/rumore.

Caratteristica peculiare del sistema è la possibilità di raggiungere alte risoluzioni anche con elevate correnti di fascio, divenendo quindi uno strumento indispensabile per coloro che sono interessato all’analisi composizionale (EDX, WDX, EBSD). Inoltre la tecnologia BDT (Beam Deceleration Technology) garantisce l’ottenimento di altissime risoluzione anche alle bassissime tensioni di accelerazione.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 1nm @ 30kV, 1,5nm @ 3kV (BDM)
  • Risoluzione LV: 1,5nm @ 30kV (LVSTD)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 1Pa a 200nA

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

SEM S8000

Microscopi FE-SEM classe UHR

Microscopi SEM ad Emissione di Campo di classe UHR con caratteristiche di Imaging e analitiche top di gamma.

Specifiche Tecniche

Microscopio elettronico a scansione a Ultra-Alta risoluzione, con sorgente ad emissione di campo (FE-SEM).

Il SEM S8000 garantisce una risoluzione di 1.4 nm a 1kV e di 0.9nm a 15kV.

Si caratterizza per un innovativo ed esclusivo sistema di rivelazione del segnale elettronico che consente di ottenere simultaneamente la massima sensibilità superficiale ed il più elevato contrasto d’immagine.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 0,9nm @ 15kV; 1,4nm @ 1kV (BDM)
  • Risoluzione LV: 1,5nm @ 30kV (BSE)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 2.000.000x
  • Corrente di Fascio: da 1pA a 400nA

Richiedi Informazioni

Per richiedere informazioni e brochures o per contattare lo specialista di prodotto compila il seguente form

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MCIsInNvcnRfb3JkZXIiOiIxMCIsImlzX3BybyI6IjAiLCJhYl9pZCI6IjAiLCJkYXRlX2NyZWF0ZWQiOiIyMDE3LTA0LTE5IDA5OjA1OjU4IiwiaW1nX3ByZXZpZXdfdXJsIjoiaHR0cHM6XC9cL3N1cHN5c3RpYy00MmQ3Lmt4Y2RuLmNvbVwvX2Fzc2V0c1wvZm9ybXNcL2ltZ1wvcHJldmlld1wvc2ltcGxlLXdoaXRlLnBuZyIsInZpZXdfaWQiOiIxOTNfNzA1ODgxIiwidmlld19odG1sX2lkIjoiY3NwRm9ybVNoZWxsXzE5M183MDU4ODEiLCJjb25uZWN0X2hhc2giOiJiOWU5NTY5MDU4MTU4ZjczZWY3NjAyMWJhZGZlMmQ2YiJ9

SEM S9000

Microscopio elettronico a scansione UHR con sorgente ad emissione di campo (FE-SEM)

Microscopi SEM ad Emissione di Campo di classe UHR con caratteristiche di imaging e analitiche top di gamma.

Specifiche Tecniche

Microscopio elettronico a scansione a Ultra-Alta Risoluzione (UHR), con sorgente ad emissione di campo (FE-SEM).

Il SEM S9000 garantisce una risoluzione di 1.0 nm a 1kV e di 0.7nm a 15kV.

Si caratterizza per un innovativo ed esclusivo sistema di rivelazione del segnale elettronico che consente di ottenere simultaneamente la massima sensibilità superficiale ed il più elevato contrasto d’immagine.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 0,7nm @ 15kV; 1,0nm @ 1kV (BDM)
  • Risoluzione LV: 1,5nm @ 30kV (BSE)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 2.000.000x
  • Corrente di Fascio: da 1pA a 400nA

Richiedi Informazioni

Per richiedere informazioni e brochures o per contattare lo specialista di prodotto compila il seguente form

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

LYRA3

Sistemi FIB-SEM con colonna Ionica al Gallio ed Elettronica FE-SEM

Sistema a doppio fascio FIB-SEM per applicazioni di nanotecnologia e nanofabbricazioni.

Specifiche Tecniche

Sistema a doppio fascio composto da una colonna FE-SEM ad alta risoluzione abbinata ad una colonna FIB, versatile e ad alte prestazioni, dotata di una sorgente a ioni di Gallio.

LYRA3 è un sistema progettato per la preparazione di cross-sections, lamelle TEM e per la tomografia ad alta risoluzione per la successiva ricostruzione 3D.

Nel LYRA 3 sono implementati i dispositivi per la litografia sia ionica che elettronica e per la microscopia correlativa.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 1,0nm @ 30kV, 1,8nm @ 3kV (BDM)
  • Risoluzione LV: 1,5nm @ 30kV (LVSTD)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 1pA a 200nA
  • Cannone Ionico LMIG: Sorgente agli Ioni di Gallio
  • Tensione di Accelerazione: 0,5kV fino a 30kV
  • Corrente di Fascio Ionico: 1pA fino a 50nA
  • Risoluzione: < 2,5nm @ 30kV al punto di coincidenza FIB-SEM

Richiedi Informazioni

Per richiedere informazioni e brochures o per contattare lo specialista di prodotto compila il seguente form

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

Serie S9000G

Sistema FIB SEM con colonna ionica al Gallio e fascio elettronico di classe UHR

Sistema FIB SEM con colonna ionica al Gallio e fascio elettronico di classe UHR.

Specifiche Tecniche

Sistema a doppio fascio composto da una colonna FE-SEM con tecnologia TriglavTM di classe UHR abbinata ad una colonna FIB, versatile e ad alte prestazioni, dotata di una sorgente a ioni di Gallio.

S9000G è un sistema di punta progettato per la preparazione di cross-sections, lamelle TEM e per la tomografia ad alta risoluzione con successiva ricostruzione 3D.

Nell’ S9000G sono implementati i dispositivi ed i software per eseguire la litografia sia ionica che elettronica e per la microscopia correlativa.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 0,7nm @ 15kV, 1,0nm @ 1kV (BDM)
  • Risoluzione LV: 2nm @ 30kV (BSE)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 2.000.000x
  • Corrente di Fascio: da 2pA a 400nA
  • Cannone Ionico LMIG: Sorgente agli Ioni di Gallio
  • Tensione di Accelerazione: 0,5kV fino a 30kV
  • Corrente di Fascio Ionico: 1pA fino a 100nA
  • Risoluzione: < 2,5nm @ 30kV al punto di coincidenza FIB-SEM

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GAIA3

Sistemi FIB-SEM con colonna Ionica al Gallio ed Elettronica UHR

Sistema a doppio fascio FIB-SEM per applicazioni di nanotecnologia e nanofabbricazioni con elevatissime prestazioni di Imaging.

Specifiche Tecniche

Sistema a doppio fascio composto da una colonna FE-SEM con tecnologia TriglavTM di classe UHR abbinata ad una colonna FIB, versatile e ad alte prestazioni, dotata di una sorgente a ioni di Gallio.

GAIA3 è un sistema di punta progettato per la preparazione di cross-sections, lamelle TEM e per la tomografia ad alta risoluzione con successiva ricostruzione 3D.

Nel GAIA3 sono implementati i dispositivi ed i software per eseguire la litografia sia ionica che elettronica e per la microscopia correlativa.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 0,7nm @ 15kV, 1,0nm @ 1kV (BDM)
  • Risoluzione LV: 2nm @ 30kV (BSE)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 2Pa a 400nA
  • Cannone Ionico LMIG: Sorgente agli Ioni di Gallio
  • Tensione di Accelerazione: 0,5kV fino a 30kV
  • Corrente di Fascio Ionico: 1pA fino a 50nA
  • Risoluzione: < 2,5nm @ 30kV al punto di coincidenza FIB-SEM

Richiedi Informazioni

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

FERA3

Sistemi FIB-SEM con colonna Ionica al Plasma di Xenon ed Elettronica FE-SEM

Rivoluzionario sistema FIB-SEM con colonna ionica al Plasma di Xenon.

Specifiche Tecniche

Il primo sistema commerciale a doppio fascio al mondo dotato della rivoluzionaria colonna ionica al Plasma di Xenon che consente di utilizzare fino a 2µA di corrente di fascio ionica.

Queste elevatissime correnti consentono un incremento delle velocità di attacco 50 volte maggiori rispetto alla tradizionale tecnologia al Gallio.

Questo fa diventare il FERA 3 lo strumento ideale per le applicazioni FIB-SEM dove è necessaria la rimozione di grandi volumi di materiale e dove la tradizionale tecnologia al Gallio impegnerebbe il sistema per decine di ore consecutive.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 1,0nm @ 30kV, 1,8nm @ 3kV (BDM)
  • Risoluzione LV: 1,5nm @ 30kV (LVSTD)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 1pA a 200nA
  • Cannone Ionico i-FIB: Sorgente al Plasma agli Ioni di Xenon
  • Tensione di Accelerazione: 3kV fino a 30kV
  • Corrente di Fascio Ionico: 1pA fino a 2microA
  • Risoluzione: < 25nm @ 30kV al punto di coincidenza FIB-SEM

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

XEIA3

Sistemi FIB-SEM con colonna Ionica al Plasma di Xenon ed Elettronica UHR

Rivoluzionario sistema FIB-SEM con colonna ionica al Plasma di Xenon e colonna elettronica UHR TriglavTM.

Specifiche Tecniche

Il sistema doppio fascio SEM-FIB XEIA 3 rappresenta la sintesi e l’apice della più avanzata tecnologia che Tescan offre al mercato.

La rivoluzionaria colonna ionica al Plasma di Xenon che consente di utilizzare fino a 2µA di corrente di fascio ionica è accoppiata alla colonna SEM UHR TriglavTM.

Questa combinazione consente simultaneamente lavorazioni FIB di scala micro e nanometrica ultraveloci o complesse ricostruzioni 3D ed un livello di immagini SEM di altissima qualità e risoluzione anche a bassissime tensioni di lavoro.

Caratteristiche Principali:

  • Cannone Elettronico: Schottky FEG
  • Risoluzione HV: 0,7nm @ 15kV, 1,0nm @ 1kV (BDM)
  • Risoluzione LV: 2nm @ 30kV (BSE)
  • Vuoto in Camera: HV < 9 x 10-3 Pa, LV da 7 a 500 Pa
  • Ingrandimenti: fino a 1.000.000x
  • Corrente di Fascio: da 2Pa a 400nA
  • Cannone Ionico i-FIB: Sorgente al Plasma agli Ioni di Xenon
  • Tensione di Accelerazione: 3kV fino a 30kV
  • Corrente di Fascio Ionico: 1pA fino a 2microA
  • Risoluzione: < 25nm @ 30kV al punto di coincidenza FIB-SEM

Richiedi Informazioni

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