PECVD/HDPCVD Plasma Therm – Advanced Vacuum

I sistemi VERSALINE di PlasmaTherm e VISION di Advanced Vacuum

Sistemi Plasma Enhanced Chemical Vapor Deposition (PECVD) e High Density Plasma Chemical Vapor Deposition (HDPCVD)  di PlasmaTherm ed Advanced Vacuum per depositare differenti film ad alta qualità.

VERSALINE PECVD

Sistemi Plasma Enhanced Chemical Vapor Deposition (PECVD) di PlasmaTherm

I sistemi VERSALINE PECVD di  Plasma Therm possono depositare differenti film ad alta qualità, con elevate standard di produttività con un contenuto Cost of Ownership.

La configurazione a parllel plate del VERSALINE PECVD è disegnata per fornire  un ambiente di processo pulito con poca manutenzione.

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VERSALINE HDPCVD

Sistemi High Density Plasma Chemical Vapor Deposition (HDPCVD) di PlasmaTherm

Il sistema VERSALINE HDPCVD di  Plasma Therm è un nuovo approccio per ottenere film conformi ad elevate densità a basse temperature del substrato.

Il sistema utilizza un plasma ICP ad alta densità con controllo della temperatura e bias al substrato.

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VISION PECVD 310

Sistemi Plasma Chemical Vapor Deposition (PCVD) di Advanced Vacuum

Il Sistema VISION PECVD 310 è un sistema per R&D di deposizione per applicazioni nei semiconduttori e nella scienza dei materiali.

Con la classica configurazione a parallel plate fornisce un ampio range di film uniformi di alta qualità.

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aGVsbF82MV83MTI5OTYiLCJjb25uZWN0X2hhc2giOiIwMDVjNzRlYWE1NTNjYmQzNDAzMWE1YmNjNmQwN2ZiMiJ9

VISION PECVD 410

Sistemi Plasma Chemical Vapor Deposition (PCVD) di Advanced Vacuum

Il sistema VISION PECVD 410 Advanced Vacuum è un sistema per R&D di deposizione Open load per applicazioni nei semiconduttori e nella scienza dei materiali.

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aGVsbF82Ml8zMDI0MTUiLCJjb25uZWN0X2hhc2giOiI4Zjg3NzVjMDI0YzhhNGY0MzRlM2UzMTAxN2FmZDRmZCJ9

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